2g tri-axis accelerometer specifications part number: KXR94-2050 rev. - aug 07 page 1 of 10 36 thornwood drive approved by date ithaca, new york 14850 prod. mgr. s. miller 8/6/07 tel: 607-257-1080 cust. mgr. k. foust 8/6/07 fax: 607-257-1146 test mgr. j. chong 8/6/07 www.kionix.com vp eng. t. davis 8/6/07 ecn # pcn # rev pg # revision description date rev'd by - initial release 8/6/07 "kionix" is a registered trademark of kionix, inc. products described herein are protected by patents issued or pending. no l icense is granted by implication or otherwise under any patent or other rights of kionix. the info rmation contained herein is believed to be accurate and reliable but is not guaranteed. kionix does not assume responsibility for its use or distribution. kionix al so reserves the right to change product specifications or disc ontinue this product at any time without prior notice. this publication supersedes and replaces all information previously supplied. ? 2007 kionix, inc. ? all rights reserved
2g t r i-axis accelerometer s p ecifications p a rt nu mber : kxr9 4-2050 rev . - aug 07 page 2 of 10 product description the KXR94-2050 is a tri- axis, silicon micromachined acceler o meter with a full-sca le output range of 2g (19.6m/ s 2 ). the sen s e element is fabricated using kionix?s proprietar y plasma mi cromachinin g process te chnology. acceleration sensing is ba s ed on the p r inciple of a differential capacitance arising from acceleration -induced motion of the sense element, which fur t her utilize s common mo de cancellat i on to decrease errors from process vari ation, temperature, and environment al stress. th e sense elem ent is hermetically seale d at the wafer level by bonding a se cond silicon lid wafer to t he device using a glass fr it. a separate asic device packaged with the sen s e element provides sig nal conditionin g and self-test. the accelerometer is delivered in a 5 x 5 x 1.2 mm dfn pl astic pa ckag e operating fr om a 2.5 ? 5.25v dc supply. the three outputs (x , y, z) are provided on three analog output pins. th e kxr94 also features a n integrated 4 - channel multiplexer (x , y, z, au x in). the enable pin must be high f o r normal operation an d lo w for po wer shutdown. functional diagram c 2 c 3 32 k x s ensor c harge a m p l if ie r o sci l l a t o r 10 2 se l f te s t o u t put x e nabl e vd d gn d 3 8 gn d 12 y s ensor c harge a m p l if ie r 32 k o u t put y z s ensor c harge a m p l if ie r 32 k o u t put z 13 vm u x 5 au x i n 9 nc s0 s1 4 6 7 11 lo gi c c 4 1kh z lp f te m p s ens or mu x 14
2g tri-axis accelerometer specifications part number: KXR94-2050 rev. - aug 07 page 3 of 10 product specifications table 1 . mechanical (specifications are for operation at v dd = 3.3 v and t = 25oc unless stated otherwise) parameters units min typical max operating temperature range oc -40 - 85 zero-g offset v 1.600 1.650 1.700 zero-g offset variation from rt over temp. mg/oc 0.2 sensitivity mv/g 647 660 673 sensitivity variation from rt over temp. %/oc 0.01 (xy) 0.02 (z) offset ratiometric error (v dd = 3.3v 5%) mg 4 sensitivity ratiometric error (v dd = 3.3v 5%) % 1.25 (xy) 0.20 (z) non-linearity % of fs 0.1 cross axis sensitivity % 2.0 self test output change on activation g 1.9 (xy) 0.5 (z) bandwidth (-3db) 1 hz 800 noise density (on filter pins) g / hz 45 notes: 1. internal 1 khz low pass filter. lower frequencies are user definable with external capacitors. table 2. electrical (specifications are for operation at v dd = 3.3 v and t = 25oc unless stated otherwise) parameters units min typical max supply voltage (v dd ) operating v 2.5 3.3 5.25 operating ma 0.50 0.95 1.40 current consumption standby a - - 5 analog output resistance(r out ) k? 24 32 40 input low voltage v - - 0.2 * v io input high voltage v 0.8 * v io - - multiplexer response time s 4.5 power up time 1 ms 1 notes: 1. power up time can also be determined by 5 times the rc time constant of the optional user defined low pass filter.
2g t r i-axis accelerometer s p ecifications p a rt nu mber : kxr9 4-2050 rev . - aug 07 page 4 of 10 table 3. environmental p a r a m e t e r s u n i t s m i n targe t m a x suppl y vo ltag e (v dd ) absolute limit s v -0.3 - 7.0 maxim u m ope r ating t e mpera t ure ran ge oc -40 - 125 storage t e mperature r a n g e oc -55 - 150 mech. shock (po w e r ed a nd u npo w e re d) g - - 500 0 for 0.5ms esd hbm v - - 3000 caution: esd sensitive and mechanical s hock sensitive component, improper handling can cause permanent damage to the de vice. the lga plastic pa ckag e conforms to european union directive 2002/95/ec on the restriction of the use of certain hazardous substances in e l ectrical an d electronic e quipment (rohs). soldering soldering recommendati ons available upon request or from www.kionix. com .
2g t r i-axis accelerometer s p ecifications p a rt nu mber : kxr9 4-2050 rev . - aug 07 page 5 of 10 application schematic c 4 14 13 12 11 10 9 8 1 2 3 4 5 6 7 c 2 c 3 kx r9 4 vd d c 1 vm u x s0 s1 st ena b l e x z y au x i n table 4. kxr94 pad descriptions pad nam e des c ription 1 nc not connected i n ternall y (can be connected to vd d or gnd) 2 x output analog output of the x-cha nnel. optionally , a cap a c itor (c 2 ) placed bet w een this pin and groun d w ill form a lo w pass filter. 3 g n d grou n d 4 aux in aux iliary input fo r multiplex e r. co nnect to vdd or g r ou nd if not use d . 5 vmux multiplexed anal og output. d o no t connect if multiplexer is not use d . 6 s0 mux selector 0 ( s ee outpu t select table). con n e c t to vdd or grou nd if not used. 7 s1 mux selector 1 ( s ee outpu t select table). con n e c t to vdd or grou nd if not used. 8 vdd the po wer suppl y input. decoupl e this pin to grou nd w i th a 0.1u f ceramic capacitor (c 1 ). 9 e n a b l e enable: high - n o rmal operation; lo w - device is in standb y , p o w er do w n mode 10 st self test: lo w ? normal ope ratio n ; high ? device is in self-test mo de 11 nc not connected i n ternall y (c an be connected to vd d or gnd) 1 2 g n d grou n d 13 y output analog output of y-channel. optio nally , a cap a citor (c 3 )placed bet ween this pin and ground w ill form a low p a ss filter. 14 z out put analog output of z-channel. optio nally , a cap a citor (c 4 ) placed bet ween this pin and ground w ill form a low p a ss filter. c e n t e r p a d grou n d
2g t r i-axis accelerometer s p ecifications p a rt nu mber : kxr9 4-2050 rev . - aug 07 page 6 of 10 application design equations 1. the bandwidth is deter mined by th e internal 1khz low pass filter. the u s er can low e r the bandwidth by placing filter capacitor s connected from pins 2, 13 and 14 t o ground. the response is sing le pole. given a desired bandwidth, f bw , the filter capacito r s are deter mined by: bw f x c c c 6 4 3 2 10 97 . 4 ? = = = 2. when using not using th e multiplexer, the kxr9 4 is a pin- co mpatible replacement for kionix?s kx m52 seri es of acce le rometers. the following application schematic sh ould be use d : pin 4 (aux in) = ground pin 5 (vmux) = do not connect pin 6 (s0) = ground pin 7 (s1) = ground c 4 14 13 12 11 10 9 8 1 2 3 4 5 6 7 c 2 c 3 kxr9 4 vdd c 1 st en a b l e x y z 3. when not connecting th e self test pin to a digital i/o port of a microcontroller, kionix recommends connecting t he self test pin to groun d.
2g t r i-axis accelerometer s p ecifications p a rt nu mber : kxr9 4-2050 rev . - aug 07 page 7 of 10 using the multiplexed output of the kxr94 m u ltiplexer data select the kxr94 features a n integrate d 4-channel multiplexer. this feat ure reduce s system mcu requirements to only 1 adc and 2 digital i/o?s. the kx r9 4 uses two select inpu ts (s0, s1) to control the data flow from vmu x . when a mi croprocesso r toggles the select inp u ts, the desired output is att a ined based on the sele ct table. not e that logic 0 is gnd and logic 1 is vdd. s 1 s 0 v m u x 0 0 x o u t p u t 0 1 z o u t p u t 1 0 y o u t p u t 1 1 a u x . i n output select table data sampling rate when operating in its multiplexed mode, the kx r94 has the ability to achieve very high d a ta sampling rates. internally, the sensor elements (x , y, and z) are sequen tially sampled in a ?roun d robin? fashion at a rate of 32khz p e r axis. not e that this is a differential capacita n ce sampling of each sensor element, which stores an analog voltage on th e filter cap f o r each axis. combine t h is high sensor element sampling rate with the short 5s settling time of th e integrated multiplexer, and the user ca n achieve a performance very close to that of the 3 separ ate analog outputs. this is more than sufficien t to eliminate any aliasing in the fina l appli c ation since the kx r94 will be operating with a typical bandwidth of ~50hz and a maxi mum of 1000hz.
2g tri-axis accelerometer specifications part number: KXR94-2050 rev. - aug 07 page 8 of 10 test specifications ! special characteristics : these characteristics have been identified as being critical to the customer. every part is tested to verify its conformance to specification prior to shipment. table 5. test specifications parameter specification test conditions zero-g offset @ rt 1.650 0.050 v 25oc, v dd = 3.3v sensitivity @ rt 660 13 mv/g 25oc, v dd = 3.3v current consumption operating 0.5 <= i dd <= 1.4 ma 25oc, v dd = 3.3v
2g t r i-axis accelerometer s p ecifications p a rt nu mber : kxr9 4-2050 rev . - aug 07 page 9 of 10 packag e dimensions and orientation 5 x 5 x 1.2 mm dfn +y +x +z +z +x m m i n c h dimens io n m i n n o m max m i n n o m max a 5 . 0 0 0 . 1 9 7 b 5 . 0 0 0 . 1 9 7 c 1 . 1 0 1 . 2 0 1 . 3 0 0 . 0 4 3 0 . 0 4 7 0 . 0 5 1 d 0 . 1 8 0 . 2 3 0 . 2 8 0 . 0 0 7 0 . 0 0 9 0 . 0 1 1 e 0 . 5 0 0 . 0 2 0 f 0 . 3 5 0 . 4 0 0 . 4 5 0 . 0 1 4 0 . 0 1 6 0 . 0 1 8 g 3 . 5 0 3 . 6 0 3 . 7 0 0 . 1 3 8 0 . 1 4 2 0 . 1 4 6 h 4 . 2 0 4 . 3 0 4 . 4 0 0 . 1 6 5 0 . 1 6 9 0 . 1 7 3 all dimensi o n s and tole ran c e s co nform t o asme y14.5m-1 994 when device is acceler a ted in +x , +y or +z direction, the correspondin g output will increase.
2g t r i-axis accelerometer s p ecifications p a rt nu mber : kxr9 4-2050 rev . - aug 07 page 10 of 10 static x/y/z output re sponse versus orienta t ion to earth?s surface (1g): p o s i t i o n 1 2 3 4 5 6 d i a g r a m top bottom bottom top x 1 . 6 5 v 2.31 v 1.65 v 0.99 v 1.65 v 1.65 v y 2.31 v 1.65 v 0.99 v 1.65 v 1.65 v 1.65 v z 1.65 v 1.65 v 1.65 v 1.65 v 2.31 v 0.99 v x- p o l a r i t y 0 + 0 - 0 0 y-polarity + 0 - 0 0 0 z-polarity 0 0 0 0 + - (1g) earth?s surface
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